Research equipments
Automatic Wafer Probers
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  • Mapping the magnetoresistance (MR) of films
  • Typical measurement result.
Magnetostriction measurement system@@@@@@@
  • resolutionƒษ~10-7
  • Measurement result.
Kerr microscope
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  • Magnification: 200~500
  • Suitable for magnetic films with in-plane or perpendicular magnetic anisotropy.
  • Magnetic domain configuration in a TbFeCo wire with perpendicular magnetic anisotropy
Surface Texture measurement system
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  • Maxmum magnification: 2000000.
SPM di innova
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  • Magnetic force microscopy, Atomic force microscopy, nanolithography.
  • Magnetic domains on commercial hard disk drive.
Maskless photolithography
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  • This special system can do photolithography without a mask.
  • Typical image of a resist coated film after lithographic process.
Vibrating sample magnetometer
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  • Maximum field: }24 kOe
  • Typical hysteresis loop of a Nd-Fe-B film with perpendicular magnetic anisotropy.
Vibrating sample magnetometer
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  • With both Helmholtz coil and electromagnet equipped, This magnetometer can measure both soft and hard magnetic materials
  • }15 kOe
  • Typical hysteresis of FeCo films on glass substrate.

Sputtering system
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  • Three targets, with both DC and RF power supply.

Facing targets sputtering system
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  • Facing targets sputtering system can sputer Fe with target thickness as thick as 5 mm.

Facing targets sputtering system.
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Sputtering system
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Sputtering system
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  • This system equipped six targets and six pair of independent power supply.
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